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Micropores Ceramic Chuck Table
Micropores Ceramic Chuck Table
Micropores Ceramic Chuck Table
Micropores Ceramic Chuck Table
Micropores Ceramic Chuck Table
Micropores Ceramic Chuck Table

Micropores Ceramic Chuck Table

►High precision microporous design
►Excellent thermal stability
►Good chemical inertness
►High hardness and wear resistance
►Easy to clean and maintain
Customized service


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Moresuperhard Micropores Ceramic Chuck Table

Ceramic chuck table is a bearing platform for fixing workpieces by the vacuum adsorption principle.

1. Features of Moresuperhard Ceramic Chuck Table

Micropores ceramic chuck table has the characteristics of high flatness and parallelism, compact and uniform structure with high strength, good permeability, uniform adsorption affinity and easy to dressing.
Workpiece: 2,3,4,5,6,8,12 inches semiconductor wafer
Suitable devices: Wafer grinder, dicing machine and cleaning machine ,etc.
Shape: Circular /Square / Rectangular  

2. Specifcations of Moresuperhard Ceramic Chuck Table
Optional material for base and frame: Aluminum Alloy /Stainless Steel/ Ceramics.
Size range: φ5mm-φ500mm
Micropore size: 5-700um
Porosity: 30-40%
Permeability uniformity: 10 x 10 mm pressure difference(±3 Kpa) We can design and make nonstandard chuck tables according to customers' requirement.

3.Different Types of Vacuum Chuck Table:
(1)Thinning Chucks
(2)Dicing Chucks
(3)Cleaning Chucks
(4)Transportation Chucks
(5)Printing Chucks
(6)Custom is available

                        Micropores Ceramic Chuck Table
                         chuck table


 
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DRESSING
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